24 electrode printhead

• Electrode oscillation frequency: 0-400 Hz
• 2 rows of 12 electrodes
• Electrode tip diameter 50 µm
• Electrode pitch 270 µm

Printhead driver electronics

• 24 channel
• adjustable trigger timing and pulse width

Standard high voltage substrate carrier

• approx. A4 size 
• Different size possible
• Glass base (flatness ± 10 µm)
• PI/Cu laminate top
• Optionally Glass/ITO top

High-voltage power supply and controller

• 1-9 kV (Peak-to-peak)
• Sine wave
• Operates at resonance frequency 
• Frequency 30-100 kHz
• Nominal power: 100 W
• Electrical input rating: 230 V AC, 50 Hz

XY-Z platform

• Modified Roland Engraving machine
• Speed 5-60 mm/s
• Accuracy XY-axis: 20 µm.
• Accuracy Z-axis: 10 µm.
• Input rating: 240 V AC, 50 Hz

Mechanical interface for the printhead

• for mounting µPlasmaPrint head 
  in Pixdro LP50 platform

Standard gas flow nozzle

• for use on dielectric substrates
• gas in- & outlet
• viewports for PlasmaView camera 

Special gas flow nozzle

• for use on conductive substrates
• gas in- & outlet
• spacer insert with ceramic spacer
• easy spacer exchange by magnetic
  spacer insert mounting
• viewports for PlasmaView camera 

Fiducial alignment camera system

• for aligned µPlasmaPrint at predefined positions
  on sample 

Inline plasmaview camera system

• for inline visualization of plasma operation

6" wafer table

• High voltage substrate table
• Vacuum clamping 

200x200 mm copper-based substrate table

• vacuum clamping by slits on all 4 sides 
• custom vacuum clamping design posibble