Standard µPlasmaPrint integration kit parts
includes:
24 electrode printhead
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Printhead driver electronics
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Standard high voltage substrate carrier
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High-voltage power supply and controller
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µPlasmaPrint Station:
includes:
Standard µPlasmaPrint integration kit |
XY-Z platform
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LP50 integration modkit
includes:
Standard µPlasmaPrint integration kit |
Mechanical interface for the printhead
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Note: Contact Meyer Burger for the additional preparation of the LP50 platform necessary for µPlasmaPrint integration.
Accessories
Standard gas flow nozzle
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Special gas flow nozzle
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Fiducial alignment camera system
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Inline plasmaview camera system
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Custom substrate carriers
6" wafer table
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200x200 mm copper-based substrate table
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Special power supplies
HV pulse source |