Eindhoven, the Netherlands – InnoPhysics B.V. and the Plasma & Materials Processing group (PMP) at the department of Applied Physics of the Eindhoven University of Technology (TU/e) are pleased to announce a collaboration in the field of patterned plasma-assisted atomic layer deposition (ALD). This collaboration is financially supported by the recently approved FOM-NWO KIEM-HTSM project “Combining micro-plasma printing and atomic layer deposition for patterned ultra-thin film preparation”, under the supervision of dr. M. Creatore (TU/e).

The aim of this collaboration is to combine the knowledge and expertise available in the academic group in the field of ALD with the µ-PlasmaPrint technology developed by InnoPhysics. Within this collaboration, the researchers will explore the potential of the µ-PlasmaPrinter technology toward ultra-thin film deposition at atmospheric pressure and low substrate temperature, devoting attention also to the improvement in spatial resolution of the deposited patterns.

The recent efforts of the two teams have allowed to integrate in the µ-PlasmaPrinter a precursor dosing head, enabling the printer to process thin film deposition in a cycle-wise fashion, where each cycle consists of alternating substrate exposures to a film growth precursor and to a (air, N2-fed) plasma step. The PMP group has also recently bought two systems from Innophysics to further explore the potential of µ-PlasmaPrint assisted ALD.

Moreover, InnoPhysics B.V. is pleased to announce prof. dr. ir. Erwin Kessels, the group leader of the PMP group and director of the NanoLab@TU/e, as their new chief scientific officer (CSO).

About InnoPhysics B.V.

InnoPhysics B.V. was founded in 2009 to commercialize the proprietary µ-PlasmaPrint technology. InnoPhysics specializes in the development and fabrication of plasma equipment used for local and patterned plasma treatment, both for activation and thin film deposition. For more information, please visit www.innophysics.com.

About  the Plasma & Materials Processing group (Applied Physics department, TU/e)

The Plasma and Materials Processing (PMP) research group (> 50 members), led by Prof. Erwin Kessels, focuses on the science and technology of plasma and materials processing. The scientific objective of the group is to obtain “atomic” level understanding of the interaction of plasma and gas phase species with materials. For more information, please visit http://www.phys.tue.nl/pmp/.

Contact

To learn more about this collaboration, please contact